Volumetric control of the flow of a filtering pump

摘要

The present invention relates to a pump of resin deposition on a semiconductive wafer including a pump body divided by a membrane of definition of a resin dispensation chamber and of a control chamber and an element of filtration of the resin before its dispensation to an outlet access of the pump body. The pump includes a control system for injecting the resin under constant pressure into the control chamber and aspiring the resin from the control chamber, and a capacitive presence sensor for detecting a first position of the membrane.