Inverted merged MR head with plated notched first pole tip and self-aligned second pole tip

摘要

A method makes an inverted merged MR head with a second pole tip which is self-aligned with a top first pole tip. After forming a bottom first pole tip layer a top first pole tip is frame plated thereon with a width that defines a track width of the merged MR head. A photoresist layer, which is employed in the frame plating of the top first pole tip, is then soft baked which causes a photoresist opening above the top first pole tip to have sloping side edges which form a recess. An electrically-conductive sacrificial layer, such as copper, is then plated into the recess on top of the top first pole tip and the photoresist is removed. A forming layer, such as alumina, is then deposited and lapped so that the forming layer and the sacrificial layer have top surfaces that are flush with respect to one another. The sacrificial layer is then removed by an etchant that will not attack the materials of the pole tips and the forming layer. The forming layer now has a recess with sloping edges into which a gap layer, a seedlayer and a second pole tip layer are deposited. By this method the second pole tip is self-aligned with the top first pole tip with the second pole tip having a bottom that is substantially the same width as the top of the top first pole tip.