Microsensor has micro electro-mechanical sensor element mounted directly on integrated circuit, connected with positional accuracy and electrically conductively via peripheral solder seam

摘要

The microsensor has a microelectromechanical sensor element (1) and an integrated circuit (4) for measurement, calibration and compensation electronics, whereby the sensor element is electrically connected to the IC. The microelectromechanical sensor element is mounted directly on the IC and connected with positional accuracy and electrically conductively via a peripheral solder seam (3).