| 摘要 |
The combination or hybridization of chemical machining (especially photochemical machining, chemical resist machining or thermal resist machining) with electrical discharge machining provides an increased efficiency machining process with unique etch characteristics and improved economics. The ability of chemical machining to accurately and rapidly machi ne a substrate to significant depths is combined with the increased flatness of wall or slope facings of the slower, but more precise, electrical discharge machining to provide three-dimensional patterning of surfaces with facial characterictics that are unique, rapidly obtained, and of high quality. The process is performed by either (a) first chemical machining to obtain the fundamental pattern and approximate depth of texturing desired in the final product and refining the grooves, walls and troughs of the patterned surface by subsequent electrical discharge machining or (b) using electrical chemica l machining to define a pattern of troughs, grooves and walls, and then extending the depth of those grooves with chemical machining (in combination with a resist over the surface of the plateaus of the initial pattern). The initial product from alternative (b) may be followed by a further electrical discharge machining to refine the groove characteristics.
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