发明名称 Magnetic energy filter
摘要 <p>A compact magnetic energy filter having at least four magnetic fields to deflect the trajectory of an electron beam from the entrance window to the exit slit. A rotational symmetry axis is located midway between the second and third magnetic fields. The magnetic fields on the opposite sides of the rotational symmetry axis are opposite in polarity.</p>
申请公布号 EP1058287(A2) 申请公布日期 2000.12.06
申请号 EP20000304593 申请日期 2000.05.31
申请人 JEOL LTD. 发明人 TSUNO, KATSUSHIGE;MUNRO, ERIC;ROUSE, JOHN
分类号 G01B11/24;G01B11/245;G01B21/20;H01J37/05;H01J49/30;(IPC1-7):H01J37/05;H01J49/46;H01J49/20 主分类号 G01B11/24
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