发明名称
摘要 PROBLEM TO BE SOLVED: To observe defect of a moving object, etc., in real time with high sensitivity by converging scattered light from a moving observation object for imaging on a photo-detecting surface, and driving a CCD element so that shift speed of charge signal corresponds to moving speed of the image. SOLUTION: The scattered light 7 from a moving observation object 5 is converged, for imaging on a photodetecting surface 3 of a CCD two-dimensional sensor 4. An image 11 corresponding to an observing point 19 is, accompanying movement toward an arrow 21 of the object 5, moved in the direction of an arrow 23. The two-dimensional sensor 4 is so driven with a drive circuit 17 that the shift speed of charge signal corresponds to the movement speed of the image 11. The charge signal of a picture element of each line 1 generated by photo-detection is shifted to an adjoining line in order with a shift resistor 15 for output, so that, from the resistor 15, the picture signal of enough intensity of a still picture of the object 5 is obtained.
申请公布号 KR100268974(B1) 申请公布日期 2000.12.01
申请号 KR19970004589 申请日期 1997.02.15
申请人 MITSUI KINZOKU KOGYO KABUSHIKI KAISHA 发明人
分类号 G01N21/88;G01N21/94;G01N21/956;H01L21/66 主分类号 G01N21/88
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