ELECTRON MICROSCOPY, AND ELECTRON MICROSCOPE, BIOLOGICAL SAMPLE INSPECTING METHOD AND BIOLOGICAL INSPECTING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an analysis precision of picture element size or less to correct the focus at a precision equal to a skilled operator by applying an analytical method based on phase difference analysis of Fourier-transformed image to the analysis of the deviation between a pair of images. SOLUTION: First and second TEM images obtained by changing the incident angle of an electron beam to a sample by use of an electronic polarization coil 13 provided above an objective lens 14 are photographed by use of an electron beam detector 17. The taken first and second TEM images are transmitted to a positional deviation analyzing computing element 20 based on phase difference analysis of Fourier-transformed image, and the deviation D that is the analytical result is transmitted to a computer 19. The focus deviation F is calculated in the computer 19 from the deviation D, and an objective current Iobj necessary for set of an intended focus is determined. The focus of the objective lens 14 is corrected on the basis of this. Since this deviation analysis method uses the phase component of the image, it is hardly influenced by the background change.