发明名称 METHOD OF FOLDING WORK AND WORK HOLDING UNIT
摘要 <p>PROBLEM TO BE SOLVED: To improve economical efficiency and reduce environmental pollution by reducing the waste of a tape to reduce the quantity of wastes, when a work is held in a frame via the tape in processing the work such as CSP substrates. SOLUTION: The lengthwise ends of a tape 15 of a min. necessary width and length for pasting the entire back side of a work 10 are pasted to a tape support 13 of a frame 11, and the work 10 is pasted to the tape 15 in a housing opening 14, thereby causing the work 10 to be held by the frame 13.</p>
申请公布号 JP2000332086(A) 申请公布日期 2000.11.30
申请号 JP19990141437 申请日期 1999.05.21
申请人 DISCO ABRASIVE SYST LTD 发明人 MORI TAKASHI
分类号 H01L21/683;H01L21/301;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/683
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