| 摘要 |
PROBLEM TO BE SOLVED: To obtain a sensor device by which not only a rotation angular velocity but also an inclination angle and a linear acceleration can be detected. SOLUTION: This sensor device 10 contains a vibrator 12 which is bending- vibrated by an oscillation circuit 56. The sum of signals which are output from an electrode 26 and an electrode 28 as two detection parts of the vibrator 12 is output from a synthetic circuit 54, and the difference between the signals is output from a differential circuit 58. In a first synchronous detection circuit 60 the output signal of the differential circuit 58 is detected in synchronization with the signal of the synthetic circuit 54. In a second synchronous detection circuit 66, the output signal of the differential circuit 58 is detected in synchronization with a signal having a phase difference of 90 deg. from the signal of the synthetic circuit 54. Respective output signals of the synchronous detection circuits 60, 66 are integrated and then amplified. |
