| 摘要 |
PROBLEM TO BE SOLVED: To provide a positive photosensitive composition having high sensitivity to infrared laser beams and excellent development latitude and storage stability. SOLUTION: The positive photosensitive composition contains a polymer compound having acid groups and an infrared absorber represented by a general formula 1, and this composition has limited solubility in an aqueous alkaline solution before irradiation with infrared rays and becomes soluble in an aqueous alkaline solution by irradiation with infrared rays. In the formula 1, each of X and Y is an O, S, Se, or Te atom; M is a methine chain having conjugated >=5C atoms; each of Rx1-Rx4 and Ry1-Ry4 is an H or halogen atom or a cyano group or the like and W is an anion. |
