| 摘要 |
PROBLEM TO BE SOLVED: To make the measuring accuracy of a three-dimensional shape improvable without being influenced by the optical aberration of an optical system. SOLUTION: A laser light source 21, a collimating lens 23 which changes a laser beam into a parallel luminous flux 22, a semitransparent mirror 24a which branches the parallel luminous fluxes 22 into two parallel luminous fluxes 22a, 22b, Galilean optical systems 26a, 26b which convert the parallel luminous fluxes 22a, 22b into beltlike luminous fluxes 25a, 25b, and galvanomirrors 27a, 27b which reflect the beltlike luminous fluxes 25a, 25b so as to change their irradiation direction constitute an illumination means 20. An objective lens group 31 which condenses measuring light from an object 6 to be measured and a reflecting mirror 32 which reflects light passed through the objective lens group 31 constitute an objective optical system 30. The objective lens group 31 is constituted in such a way that its focus can be moved. A light receiving means 40 is constituted in such a way that a plurality of photoelectric conversion elements are arranged side by side two-dimensionally. The light receiving means 40 is arranged in such a way that one row of the photoelectric conversion elements agrees with a position which is conjugate with the focus of the objective optical system 30.
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