发明名称 ELECTROSTATIC ACTUATOR, OPTICAL SWITCHING ELEMENT, IMAGE DISPLAY DEVICE, AND THEIR CONTROL METHODS
摘要 PROBLEM TO BE SOLVED: To provide an optical switching device high in producing yield and low in power consumption. SOLUTION: In this electrostatic actuator 40 for driving a switching part, a driving voltage Vs is applied to an intermediate electrode 53 for driving the switching part 30 to keep upper and lower electrodes 50, 56 at a fixed voltage. Thus, the adjacent upper electrodes 56 can be continued to reduce the number of supporting struts for supporting each upper electrode 56. Therefore, since the electrostatic actuator 40 can be increased in flexibility of design to increase its area efficiency, the objective electrostatic actuator 40 high in yield and low in power consumption is obtained, and the optical switching element 1 and the image display device 2 using the actuator can be obtained.
申请公布号 JP2000330041(A) 申请公布日期 2000.11.30
申请号 JP19990140093 申请日期 1999.05.20
申请人 SEIKO EPSON CORP 发明人 TAKEDA TAKASHI
分类号 G02B26/08;(IPC1-7):G02B26/08 主分类号 G02B26/08
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