| 摘要 |
<p>PROBLEM TO BE SOLVED: To achieve high-sensitivity detection while retaining a water source that can be reproduced by bringing a gas/steam flow into contact with small- capacity water for measuring the change in conductivity and/or pH with time, performing purification when the conductivity and/or pH of the water exceeds a preset level for applying to further use. SOLUTION: A device for detecting a harmful substance in an exhaust gas flow in a semiconductor industry or the like is provided with, for example, a conductive cell 1, a water reservoir 2, an ion exchange resin cartridge 3, and the like. Then, deionized water in the water reservoir 2 moves into a chamber 6 of the cell 1 via a water-filling pipe 5 and a valve manifold 4 by compressed nitrogen or the like and starts sampling an exhaust flow through a hole 9. The concentration of exhaust flow type is obtained from conductivity data that is measured by a conductivity proof 8. Water in the chamber 6 is discharged to the cartridge 3 by specific control due to an increase in the conductivity for deionization. The exhaust flow type can also be detected by measuring pH and pIon.</p> |
