| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical axis adjusting method capable of easily setting an optical axis in the rear surface of a cantilever in a scanning probe microscope equipped with an optical lever type displacement detection system constituted by utilizing the rear surface of the cantilever, an optical axis adjusting auxiliary jig fitted thereto and the scanning probe microscope having optical axis adjusting constitution. SOLUTION: In a scanning probe microscope equipped with optical displacement detection system 107, 108 constituted by utilizing a freely detachable cantilever and the rear surface thereof and an optical axis adjusting method of the cantilever of the optical displacement detection systems, a laser beam observation member 11 having an irradiation surface 11a wider than the area of the rear surface of the cantilever is attached to the same position as the attaching position of the cantilever in place of the cantilever and the irradiation surface of the leaser beam observation member 11 is observed by an optical microscope 110 and the spot of the detection beam applied to the irradiation surface of the laser beam observation member 11 in the observation visual field of the optical microscope 110 is moved to a reference position.
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