Conductive substrate for a photoelectric conversion device and its manufacturing method

摘要

A substrate for a photoelectric conversion device that is effective in trapping light in a photovoltaic layer and can be manufactured by industrial mass-production, a method of manufacturing the same, and a photoelectric conversion device using the same. On a glass sheet 55 containing an alkaline component, a first undercoating film 51 containing tin oxide as a main component, a second undercoating film 52, and a conductive film 53 containing tin oxide as a main component are formed in this order, thus obtaining a substrate 50. The first undercoating film is formed by a thermal decomposition oxidation reaction of coating-film forming materials containing chlorine on glass with a temperature of at least 600 DEG C. In the first undercoating film, holes are formed without an after-treatment. The surface of the conductive film above the holes has larger irregularities, thus scattering incident light on a photovoltaic unit 57. Further, on the photovoltaic unit, a back electrode 59 is formed, thus obtaining a photoelectric conversion device. <IMAGE>