发明名称 Manufacturing process and structure of capacitor
摘要 A method is provided for manufacturing a capacitor having a generally crosssectionally modified T-shaped structure with a rough surface to serve as a lower capacitor plate, and having another dielectric layer and another conducting layer to construct an upper capacitor plate. Such a structure not only significantly increases the surface area of the capacitor but is conducive to the subsequent planarization process.
申请公布号 US6153462(A) 申请公布日期 2000.11.28
申请号 US19980132557 申请日期 1998.08.11
申请人 MOSEL VITELIC INC. 发明人 KING, WEI-SHANG
分类号 H01L21/02;H01L21/8242;(IPC1-7):H01L21/824 主分类号 H01L21/02
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