| 摘要 |
PROBLEM TO BE SOLVED: To provide a high performance cleaning device enabling ultrasonic cleaning and steam cleaning by means of a solvent distilled and regenerated in high purity. SOLUTION: This cleaning device is provided with a cleaning tank 2, a reserve tank 3, a vacuum pump 7, a steam generating vessel 4 containing a cleaning liquid in the heated state therein, a heat insulating tank 15 which is disposed on an outer peripheral part of a cleaning tank 6 and receives the supply of cleaning steam, a clean tank 16 which stores the cleaning liquid liquefied in the heat insulating tank 15, a condenser 17 which condenses the cleaning steam through the clean tank 16, an ejector 20 which keeps the steam generating vessel 4 in a prescribed evacuated state and a steam generator 23 which is communicated with the cleaning tank 2 and provided with a heating mechanism therein. Thereby, the cleaning liquid supplied from the clean tank 16 is injected into a steam generator 23 which is in the vacuumed state and, thereby, the cleaning steam is supplied into the cleaning tank 2. |
