| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate dividing device applying a damage preventing measure of a divided unit substrate. SOLUTION: This substrate dividing device, for dividing a composite substrate 3 formed by connecting a plurality of unit substrates 2 through a division groove 1 into each unit substrate 2, is provided with a pair of upper/lower position interposition rollers 4, 5 applying stress to an extent only folding with the division groove 1 serving as the boundary and upper/lower position conveying belts 6, 7 circulated for feeding the composite substrate 3 between a pair of the interposition rollers 4, 5. Here, the upper/lower position interposition rollers 4, 5 are formed of a tube cylindrically holding a shape with a prescribed, internal air pressure.
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