THINNER COMPOSITION FOR REMOVING SPIN-ON-GLASS AND PHOTOSENSITIVE RESIN

摘要

PURPOSE: A thinner composition for removing spin-on-glass and photosensitive resin composition is provided, which has excellent melting speed and volatility for spin-on-glass and photosensitive resin. CONSTITUTION: The thinner composition comprises 40-80 wt% of propyleneglycol monoalkylether; 10-30 wt% of monooxycarbonic acid ester; 1-20 wt% of alkyl ethanoate; and 1-20 wt% of alkyl lactate. The propyleneglycol monoalkylether is selected from the group consisting of propyleneglycol monomethylether, propyleneglycol monoethylether, propyleneglycol monopropylether and propyleneglycol monobutylether. The monooxycarbonic acid ester is selected from the group consisting of methyl 3-methoxypropionate, ethyl 3-ethoxypropionate, ethyl 3-methoxypropionate, methyl 3-ethoxypropionate, methyl 2-methoxyacetate, ethyl 2-ethoxyacetate, methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, propyl 2-hydroxypropionate, ethyl 2-methoxypropionate, propyl 2-ethoxypropionate, ethyl 2-ethoxypropionate, methyl β-methoxyisonate and methyl α-hydroxyisonate. The alkyl ethanoate is selected from the group consisting of methyl ethanoate, ethyl alkyl ethanoate and butyl ethanoate. The alkyl lactate is selected from the group consisting of methyl lactate, ethyl lactate and butyl lactate.