| 摘要 |
PROBLEM TO BE SOLVED: To efficiently conduct supply of clean air into both a positive pressure room and a negative pressure room and to smoothly conduct a series of dispensing operation to be executed in a clean environment, by forming one clean room with one system of an air circulating facility and dividing the room into the positive pressure room and the negative pressure room. SOLUTION: The clean room comprises a negative pressure room adjacent to a positive pressure room, an air channel for allowing falling of the air in the positive pressure room in the negative pressure room, a safety cabinet 10 installed in the negative pressure room, and an exhaust duct 34 having an exhaust fan 30 for forcibly exhausting the air in the negative pressure room out of the clean room. In this case, an exhaust port 34 of the cabinet 20 is connected to the duct 34 through a thimble flange 35 having an opening 36.
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