| 摘要 |
PROBLEM TO BE SOLVED: To calculate the capacitance values between the paired electrode sections of a plurality of capacitive mechanical quantity sensors each having a pair of electrode sections at a different distance by measuring the capacitance between the electrode sections of each sensor and finding the correlation of the measured capacitance value with the distance between the electrode sections, and then, subtracting the zero-distance capacitance value when the distance between the paired electrodes is zero from the measured capacitance value between the electrodes. SOLUTION: The capacitances between the paired capacity electrodes of sensors A-C which are different from each other in their electrode-to-electrode distances dA-dC only are measured respectively through wiring sections. An asymptote L1 is found from a graph made by plotting the reciprocal numbers 1/CA, 1/CB, and 1/CC of the measured capacitance values CA, CB, and CC of the sensors A-C against the electrode-to-electrode distances dA-dC and the zero-distance capacitance value CO when the distances dA-dC are zero is found as a reciprocal number 1/CO. The reciprocal number 1/CO is equal to the summed value of the reciprocal numbers of the parasitic capacitances of the wiring sections containing fixed sections. Then the capacitance value of the capacity electrodes only can be found by subtracting the reciprocal number 1/CO from the reciprocal numbers 1/CA, 1/CB, and 1/CC. |
