| 摘要 |
PROBLEM TO BE SOLVED: To obtain an appearance inspecting method and apparatus which can obtain high image quality of an object to be inspected, in focus throughout the entire object. SOLUTION: In a visual inspecting method and apparatus, two images on different focusing surfaces are simultaneously obtained by using two TDI cameras 23 and 24 having sensitivities only at wavelength bandsλandλ2, and thereafter the images are cut out, compared and inspected according to zone partitions defined previously. In another example of the visual inspecting method and apparatus, images are acquired by a confocal microscope having two corresponding pinhole arrays provided in its illumination and light receiving sides and a single TDI camera. |
