SEMICONDUCTOR ELEMENT FAILURE ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor element failure analyzer using an EMS capable of freely moving between various kinds of measurement devices such as a semiconductor tester and allowing easy direct connection with the measurement devices having various shapes. SOLUTION: In this analyzer, an EMS 1 is directly mounted on a base stand 2 having casters 10, and height adjustment mechanisms 2a and width adjustment mechanisms 2b in an area allowing setting of a measurement device 3. Light shielding necessary for use of the EMS 1 is realized by shielding only between an optical object lens 9 and a semiconductor element socket 4 storing an analyzed object (a semiconductor element) at least requiring a light shield state. The semiconductor element socket 4 is fixed on the base stand 2 through a fixing/shielding plate 6 and a fixing plate 7.