发明名称 SEMICONDUCTOR MANUFACTURING DEVICE
摘要 PROBLEM TO BE SOLVED: To perform work while ensuring safety by only one worker even if a person confirming safety is not stationed at a door on a side where the worker cannot confirm visually. SOLUTION: Door opening and closing switches 50 and 52 are provided at a front door 34 and a rear door 36, and a door opening and closing condition is input into a controller for mechanism part. A connection condition to a connection port 42 or a connection port 44 of a terminal for adjustment 38 or 40 is also input into the controller for mechanism part. When the front door 34 and the rear door 36 are opened and the terminal for adjustment 38 or 40 is not connected, a mechanism part on a side to which it is not connected is stopped, and when both doors 34 and 36 are closed and either of the terminal for adjustment 38 and 40 is connected, all the mechanisms can operate by the above-mentioned signals.
申请公布号 JP2000320794(A) 申请公布日期 2000.11.24
申请号 JP19990132586 申请日期 1999.05.13
申请人 KOKUSAI ELECTRIC CO LTD 发明人 OZAKI KEITA
分类号 F16P3/10;(IPC1-7):F16P3/10 主分类号 F16P3/10
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