发明名称 DOPING METHOD OF COMPOUND SEMICONDUCTOR CRYSTAL
摘要 PROBLEM TO BE SOLVED: To achieve an infrared detector having a satisfactory characteristic with good reproducibility even in the event of defects of a crystal, in a coping method of a compound semiconductor crystal. SOLUTION: A non-doped HgCdTe crystal is subjected to heating operation for controlling an Hg hole density so that a p-type HgCdTe crystal 1 is formed. Thereafter, the p-type HgCdTe crystal 1 is immersed in a solution containing Ib-group elements, so that the Ib-group elements are doped into the p-type HgCdTe crystal 1. Then, the surface of the p-type HgCdTe crystal 1, in which the Ib-group elements are doped, is removed by 5μm or more.
申请公布号 JP2000323501(A) 申请公布日期 2000.11.24
申请号 JP19990133667 申请日期 1999.05.14
申请人 FUJITSU LTD 发明人 OZAKI KAZUO;YAMAMOTO KOSAKU
分类号 H01L21/388;H01L21/22;H01L21/38;H01L31/0264;(IPC1-7):H01L21/388;H01L31/026 主分类号 H01L21/388
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