Glass sheet with conductive film, method of manufacturing the same, and photoelectric conversion device using the same

摘要

On a glass sheet 35, undercoating layers 31 and 32 and a conductive film 33 containing tin oxide as a main component are formed suitably in this order. On the conductive film 33, a photoelectric conversion unit 37 and a back electrode 39 are formed, thus obtaining a thin film photoelectric conversion device. In the present invention, the absorption coefficient of this conductive film is decreased up to 1.2 x 10<3> cm<-1> or less. In another embodiment of the present invention, the chlorine concentration in a conductive film is set to be 0.11 wt.% or lower and the fluorine concentration in the conductive film is equal to or higher than the chlorine concentration. In still another embodiment, in a wavelength of 550 nm, a conductive film is formed so that a glass sheet with a conductive film has a transmittance of at least 79% and a haze ratio of at least 4%.