| 摘要 |
<p>A heating resistor containing RE2O3 (where RE represents a rare earth element) in a predetermined amount. The mole ratio of residual oxygen to RE2O3, the amount of residual oxygen being expressed on an SiO2 basis and being obtained by subtracting the amount of oxygen contained in RE2O3 from the total amount of oxygen, falls within a predetermined range. A crystal phase of disilicate or melilite serves as a predominant phase of grain boundaries. The heating resistor contains a conductive component, such as WC or TiN, which contains one or more elements selected from among Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, and W. The heating resistor is embedded in a substrate, yielding a ceramic heater. <IMAGE></p> |
