IMAGING USING SPATIAL FREQUENCY FILTERING AND MASKING

摘要

A method of, and an apparatus for, creating an image of currents flowing through current paths in a microelectronic circuit such that the image of the currents has improved spatial resolution using filter. The filters (40) increase the spatial resolution and eliminate noise and edge artifacts in magnetic field and electric field images of electronic circuits. In accordance with the method, a magnetic field image is created with a scanning SQUID microscope (32). A magnetic inversion technique is then used to convert the magnetic field image into a current density image. The current density image is filtered based upon known restrictions on the wiring geometry of the microelectronic circuit being imaged. The technique can also be applied to convert electric fields of a circuit from a scanning single electron transistor microscope into images of the voltage levels on the wires in the circuit.