GATE VALVE AS ONE BODY WITH BUFFER MODULE

摘要

PURPOSE: A gate valve as one body with a buffer module is provided to prevent an operation rate of a process chamber from being decreased by a periodic cleaning of the valve by easily detaching a window for cleaning while checking if the operation of the valve is normal, and to eliminate an unnecessary cost by exchanging O-rings only. CONSTITUTION: A gate valve as one body with a buffer module has a valve housing(100), a blade(210) and a body. The valve housing has a spacer part(102) of a predetermined length extended from a rear side of a wafer movement path(110). A cleaning port(120) of a constant area connected to the wafer movement path is formed on the spacer part. A transparent window is detachably installed in the cleaning port so that the inside of the wafer movement path and the blade can be observed.