| 摘要 |
PURPOSE: An apparatus for storing a semiconductor wafer is provided to prevent the semiconductor wafer from being contaminated and damaged by eliminating static electricity generated on the semiconductor wafer. CONSTITUTION: An apparatus for storing a semiconductor wafer comprises a body, a slot(206), a conductive contact(208) and a ground terminal. The body has an inner space, in which an opening for loading/unloading the wafer of a predetermined diameter is formed on one surface of the body. The slot on which the wafer is placed is positioned in the inner space of the body. The ground terminal is composed of two terminals, of which one terminal is connected to the contact and the other terminal is exposed to the outside of the body.
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