| 摘要 |
PURPOSE: A semiconductor apparatus for distributing photoresist is provided to minimize the loss of photoresist, by using a stepping motor to distribute minimum quantity of the photoresist needed to form a photoresist layer applied on a semiconductor wafer. CONSTITUTION: A semiconductor apparatus for distributing photoresist comprises a memory block(204), a control block(202), a motor driving block(206) and a photoresist distributor(208). The memory block stores an established recipe for distributing the photoresist. The control block generates a distribution control initialization signal when a wafer settles in a settling part of a coating unit, and generates a driving control signal for controlling a distribution by the established recipe. The motor driving block generates a driving signal of a stepping motor by using a power supplied from the exterior in response to the driving control signal. The photoresist distributor has the stepping motor operated by the motor driving signal, and initializes a distribution control position in response to the initialization signal. And the photoresist distributor controls the quantity of the photoresist exhausted from the receptacle and supplied to the coating apparatus.
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