A combustible gas diode sensor

摘要

A combustible gas sensor diode including a SiC semiconductor substrate (12), on top of which an AlN layer (16) and a catalytic metal "gate" electrode (18) are deposited is disclosed. The combustible gas sensor diode can be operated in either a D.C. forward conduction mode or an A.C. reverse bias mode. Methods of detecting combustibles in both D.C. and A.C. modes are further disclosed.