发明名称 Superconducting device and a method of manufacturing the same
摘要 This invention provides a superconducting device with good characteristics that can be reproduced at an arbitrary place on a substrate and a method of manufacturing the same. A convex region (a processed, linearly-shaped platinum thin film) of oriented metal is provided on a substrate as a gate electrode. Then, an oxide insulating film (SrTiO3 thin film) is deposited on the convex region, and further a YBa2Cu3O7 oxide superconducting thin film is deposited on the oxide insulating film. Accordingly, a grain boundary part is formed on the convex region. A drain electrode and a source electrode are formed facing each other with the grain boundary part in between.
申请公布号 US6147360(A) 申请公布日期 2000.11.14
申请号 US19980082761 申请日期 1998.05.21
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD. 发明人 ODAGAWA, AKIHIRO;ADACHI, HIDEAKI;SETSUNE, KENTARO
分类号 H01L39/22;(IPC1-7):H01L29/06 主分类号 H01L39/22
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