发明名称 |
Superconducting device and a method of manufacturing the same |
摘要 |
This invention provides a superconducting device with good characteristics that can be reproduced at an arbitrary place on a substrate and a method of manufacturing the same. A convex region (a processed, linearly-shaped platinum thin film) of oriented metal is provided on a substrate as a gate electrode. Then, an oxide insulating film (SrTiO3 thin film) is deposited on the convex region, and further a YBa2Cu3O7 oxide superconducting thin film is deposited on the oxide insulating film. Accordingly, a grain boundary part is formed on the convex region. A drain electrode and a source electrode are formed facing each other with the grain boundary part in between.
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申请公布号 |
US6147360(A) |
申请公布日期 |
2000.11.14 |
申请号 |
US19980082761 |
申请日期 |
1998.05.21 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD. |
发明人 |
ODAGAWA, AKIHIRO;ADACHI, HIDEAKI;SETSUNE, KENTARO |
分类号 |
H01L39/22;(IPC1-7):H01L29/06 |
主分类号 |
H01L39/22 |
代理机构 |
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地址 |
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