| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cleaning processor capable of reducing cost for obtaining clean air and miniaturizing an apparatus. SOLUTION: An atmospheric fluid in an apparatus is supplied upward of a circulating tank 19 by a fan 25. This atmospheric fluid is separated into a gas and a liquid through their collision with a gas/liquid separate plate 22. Namely, the atmospheric fluid collides with the gas/liquid separate plate 22 and is also supplied upward by the fan 25, and the liquid is dropped downward with water from a shower 23 and is stored in the circulating tank 19. Furthermore, the gas which is separated into gas and liquid rises upward, and a mist component is removed by a mist catcher 24. Moreover, the gas in which the mist component is removed is filtered by a ULPA filter 26 to turn into a clean air, which is supplied to the apparatus through recycling.</p> |
