发明名称 Handling thin workpieces
摘要 A novel technique and apparatus for receiving, holding and/or transporting thin planar workpieces and the like that involves radially supporting circumferentially spaced thin and flexible annular ring sectors about a fixed planar central circular disc upon which the workpiece is to be received, and by limitedly rotationally bending the ring sectors about the disc, causing circumferential leaf springs bridging the successive ring sectors and carrying workpiece holding fingers to deform and thereby expand (or retract) the radial position of the fingers to accommodate the edges of the workpiece.
申请公布号 AU3319200(A) 申请公布日期 2000.11.14
申请号 AU20000033192 申请日期 2000.04.03
申请人 ARTHUR KEIGLER 发明人 ARTHUR KEIGLER
分类号 H01L21/687 主分类号 H01L21/687
代理机构 代理人
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