PLASMA TREATMENT METHOD AND PLASMA TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a plasma treatment method which make plasma generation and retention easy in a desired region and enables plasma treatment at a high power and high electric power efficiency. SOLUTION: This plasma treatment method is to carry out plasma treatment by generating first plasma between a pair of electrodes by applying high frequency voltage to the electrodes and causing reaction of the first plasma on an object to be treated in a first region and comprises a first step (S701) of generating second plasma in a second region different from the first region and a second step (S703) of generating the first plasma in the first region. The second region is made smaller than the first region.