发明名称 Pressure sensor
摘要 PCT No. PCT/NO97/00053 Sec. 371 Date Aug. 26, 1998 Sec. 102(e) Date Aug. 26, 1998 PCT Filed Feb. 20, 1997 PCT Pub. No. WO97/32190 PCT Pub. Date Sep. 4, 1997A pressure sensor for measuring high pressures, the sensor being adapted to act externally on a measuring element, the measuring element having a central cavity and being composed of two parts which are sealingly joined in order to form the cavity, and comprising sensor means for measuring the mechanical stress condition of the measuring element. The two parts of the measuring element are manufactured in planar technology form silicium or quartz and have a substantially larger length than lateral dimensions, the cavity being oriented in a longitudinal direction, and the sensor means being piezo-resistive elements lying adjacent to the external or internal surface of the measuring element.
申请公布号 US6145383(A) 申请公布日期 2000.11.14
申请号 US19980125775 申请日期 1998.08.26
申请人 NYFOTEK AS 发明人 MERINGDAL, FRODE;SEEBERG, BJOERN ERIK
分类号 G01L9/04;G01L9/00;(IPC1-7):G01L9/06 主分类号 G01L9/04
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