| 摘要 |
PROBLEM TO BE SOLVED: To shorten exposure time and to improve productivity by polarizing electronic beams in a rotary direction or a direction opposite to the rotary direction by turning them to rotary speed, exposing the pattern of the rotary direction and exposing the pattern by not turning on/off the electronic beam but by the polarization control of the electronic beam. SOLUTION: At the time of exposure for forming an inserted picture pit pattern, a disk 5 is always rotated by a rotation stage 3 and the pit pattern is sequentially moved on a time axis. An electronic beam is not fixed, a sawtooth wave signal is inputted and it is polarized/controlled without turning on/off the electronic beam at a part where a pit exists and a part where it does not exist. The electronic beam is polarized and the electronic beam is irradiated so that it follows the pit position of a rotating sample. Irradiation time against one pit becomes long. When the irradiation time of the electronic beam against one pit is made to be similar, rotary speed can be improved compared to a case when the electronic beam is not polarized and time required for exposure work time is shortened.
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