| 摘要 |
<p>An edge gripping wafer handling apparatus (10) for holding and transporting wafers (14) in a clean room environment is implemented by mounting gripping fingers on a paddle arm (12) adapted to be controlled by a robot. At the free end of the paddle arm, a plurality of fixed fingers (16) are mounted. Each of these fingers includes a notch for gripping the wafer. A moving finger (18) is mounted close to the fixed end of the paddle arm. The moving finger can be smoothly moved to engage the fixed fingers. The movement of the moving finger is caused by a bellows (52) flexing a hinge connected to the finger.</p> |
