Target used for sputtering cathodes of vacuum deposition devices has protrusions extending into the target material

摘要

Target is made of a target material (1) surrounded on its narrow side by a frame (2) and on its wide side by a casting plate (3). Several protrusions (4) extend into the target material. At least a part of the protrusions have openings (5). The frame is made of a non-magnetic metallic material which does not form an alloy with the target material at the melting temperature of the target material.