发明名称 Electron beam evaporator for vacuum coating apparatus
摘要 The electron beam evaporator, for a vacuum deposition apparatus, has at least one crucible to hold a liner of the material t evaporated.. The liner is held centrally in the crucible (1) by spacers (4) and with a defined gap (5) between the bottom of the liner and the base of the crucible (1). The spacers grip in facing grooves in a positive fit.
申请公布号 EP1050596(A1) 申请公布日期 2000.11.08
申请号 EP20000107652 申请日期 2000.04.10
申请人 SATIS VACUUM INDUSTRIES VERTRIEBS - AG 发明人 SIEGRIST, BEAT
分类号 C23C14/24;C23C14/30 主分类号 C23C14/24
代理机构 代理人
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