发明名称 CONFOCAL MICROSCOPE AND ADJUSTING METHOD
摘要 PROBLEM TO BE SOLVED: To make it possible to easily eliminate the mispositioning between a color screen and a confocal black and white screen when such mispositioning is induced by a temperature drift, etc., by constituting the above microscope in such a manner that sings for adjustment are respectively displayed on a display screen based on luminance information and a display screen based on color information. SOLUTION: This microscope has a light source for irradiating an object (sample) W with light, a first optical system 1 for having the reflected light or transmitted light from the object W received in a first photodetector 19b through the optical system inclusive of an objective lens 17 and a second optical system 2 for irradiating the sample W with the illumination light for the color information different from the light and having the response light received in a second photodetector 24. The color confocal image is displayed on the display screen in accordance with the luminance information from the first photodetector 19b and the color information from the second photodetector 24. The signs for adjustment are displayed on the display screen based on the luminance information and the display screen based on the color information. The mispositioning may be eliminated by the regulation of these signs and the confocal black and white screen.
申请公布号 JP2000310734(A) 申请公布日期 2000.11.07
申请号 JP19990120185 申请日期 1999.04.27
申请人 KEYENCE CORP 发明人 NISHIMURA MICHINORI;ISHIHARADA SHUICHI
分类号 G02B21/00;(IPC1-7):G02B21/00 主分类号 G02B21/00
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