REGENERATOR OF ABRASIVE AND REGENERATING METHOD OF ABRASIVE

摘要

PROBLEM TO BE SOLVED: To easily regenerate an abrasive containing abrasive grains having grinding performance equal to new liquid from an abrasive used for chemical and mechanical grinding by redispersing abrasive grains in the abrasive used for chemical and mechanical grinding. SOLUTION: Waste liquid of high concentration is delivered to a redispersing tank 45 from a dispersion medium pH adjusting tank through a high concentration waste liquid tank by a pump. At this time, the high concentration waste liquid passes the inside of an electromagnetic processing device 43 interposed in a high concentration waste liquid line 202. Bulky particulates in the high concentration waste liquid are redispersed by an ultrasonic wave of 10-30 kHz oscillated from an ultrasonic wave oscillating plate 46 in the redispersing tank 45. Additionally, a dispersant is input from a dispersant supply line 48 so that its concentration becomes about 0.1 wt.%-2 wt.% (for example, 0.5 wt.%) against the high concentration waste liquid.