| 摘要 |
PROBLEM TO BE SOLVED: To make improvable the compatibility of material while the good sterilizing efficiency is kept by repeating the evacuation of a chamber to generate plasma in the chamber, and the processing of ventilating the chamber to be substantially atmospheric pressure or sub-atmospheric pressure plural times in a conditioning processing of a filling material. SOLUTION: A vacuum pump 14 is connected through a valve 16 to a vacuum chamber 12 of a sterilizing apparatus 10, and a supply source for a reactant chemicals 18 is connected to the vacuum chamber 12 by piping including a valve 20. A high-frequency generator 22 is electrically connected to an internal plasma generating device in the vacuum chamber 12 by a connecting member 24, and HEPA ventilating device 26 is connected to the vacuum chamber 12 through piping or a valve 28. Conditioning a filling material, and then a chemical sterilizer is introduced, and further sterilizing processing is maintained. In the conditioning processing of the filling material, the processing of evacuating the chamber, generating plasma in the chamber, and ventilating the chamber to be substantially atmospheric pressure or sub-atmospheric pressure is repeated at least twice. |
