| 摘要 |
PROBLEM TO BE SOLVED: To suppress electrification and prevent the orbit of electrons from being warped when it is used for an electron beam device by forming an irregular roughened layer on the spacer substrate of an interval maintaining structural body (spacer) arranged between an electron source and a plate facing the electron source, and including fine grains and a binder in the roughened layer. SOLUTION: This spacer is provided with a spacer substrate 1 and a roughened layer 4 covering the spacer substrate 1, and the roughened layer 4 includes fine grains and a binder. Irregularities on the spacer substrate 1 mitigate the incidence angle for multiple directions. A high-resistance film 2 for preventing electrification is formed on the surface of the spacer substrate 1. The high-resistance film 2 finally forms irregularities after the surface irregularities of the roughened layer 4 formed on the spacer substrate 1. A low- resistance film 3 for obtaining the ohmic contact between upper and lower electrode substrates and the spacer is formed.
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