| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to eliminate the glass protrusion of a winding window part and to improve a yield by alternately sputtering magnetic metallic films and insulating films on a nonmagnetic substrate, then subjecting a deposition plate to a heat treatment, thereby removing the gas remaining in the deposited films and forming cores of a lamination type. SOLUTION: When both core blocks produced by prescribed stages are joined and are cut to a specific thickness, a head chip having a winding window 10 where a sufficient winding space is assured at the cross section is obtained. The winding 9 is thereafter applied through the winding window 10, by which the head chip 15B integrated with the C core 1 and the I core 2 is obtained. The deposition plate is subjected to the heat treatment after the magnetic metallic films 4 and the insulating films 5 are sputtered on the nonmagnetic substrate 3 and before glass for joining the two core blocks is packed. As a result, the prior desorption of the gaseous Ar included in the magnetic metallic films 4 and the insulating films 5 at the sputtering is made possible.
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