发明名称 |
PROCESSING METHOD OF SHADOW MASK AND PROCESSING DEVICE AND SHADOW MASK MATERIAL |
摘要 |
PROBLEM TO BE SOLVED: To restrain generation of blackening nonuniformity at the time of a blackening processing of a SM(shadow mask) and improve a productivity of the SM by restraining formation of a boron nitride at a SM surface. SOLUTION: A SM material W constructed of a band-shaped metal thin board is subjected a surface cleaning processing and a coating processing by transporting itself to a surface cleaning processing part 10, an acid processing part 20, a neutralization processing part 30, and a coating processing part 40 in order. The SM material W of which surface is under exposed and is simultaneously subjected an oxidizing action of acid processing liquid 23 and a positive electrode oxidizing action of an electrolytic device D at the acid processing part 20. Accordingly, a thick oxidizing film is formed on the surface of the SM material W.
|
申请公布号 |
JP2000306505(A) |
申请公布日期 |
2000.11.02 |
申请号 |
JP19990112404 |
申请日期 |
1999.04.20 |
申请人 |
DAINIPPON SCREEN MFG CO LTD |
发明人 |
MIYAJI YASUYOSHI;OMOTO KOICHI |
分类号 |
H01J9/14;C22C38/00;C23C22/50;C25D11/34;(IPC1-7):H01J9/14 |
主分类号 |
H01J9/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|