发明名称 PROCESSING METHOD OF SHADOW MASK AND PROCESSING DEVICE AND SHADOW MASK MATERIAL
摘要 PROBLEM TO BE SOLVED: To restrain generation of blackening nonuniformity at the time of a blackening processing of a SM(shadow mask) and improve a productivity of the SM by restraining formation of a boron nitride at a SM surface. SOLUTION: A SM material W constructed of a band-shaped metal thin board is subjected a surface cleaning processing and a coating processing by transporting itself to a surface cleaning processing part 10, an acid processing part 20, a neutralization processing part 30, and a coating processing part 40 in order. The SM material W of which surface is under exposed and is simultaneously subjected an oxidizing action of acid processing liquid 23 and a positive electrode oxidizing action of an electrolytic device D at the acid processing part 20. Accordingly, a thick oxidizing film is formed on the surface of the SM material W.
申请公布号 JP2000306505(A) 申请公布日期 2000.11.02
申请号 JP19990112404 申请日期 1999.04.20
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 MIYAJI YASUYOSHI;OMOTO KOICHI
分类号 H01J9/14;C22C38/00;C23C22/50;C25D11/34;(IPC1-7):H01J9/14 主分类号 H01J9/14
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