发明名称 |
ADJUSTABLE CLEAN-AIR FLOW ENVIRONMENT |
摘要 |
Enclosures having adjustable clean gas flow environments and methods of enclosed pressure differential distribution technology. Specifically, clean gas flow enclosures, which provide for the isolation of materials from airborne micro-particulate contamination. An embodiment of the invention utilizes a small footprint, modular, selectable, clean-gas flow environment for handling and isolating materials. The environment can be a clean room class environment by providing filtered gas from a gas flow generator (12) through a gas filter (13) to a filtered gas flow space (20). An embodiment of the invention provides a first plenum (23) and a second plenum (26) so that both a horizontal filtered gas flow and vertical filtered gas flow may be used separately or in combination within the same filtered gas flow space (20).
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申请公布号 |
WO0064562(A1) |
申请公布日期 |
2000.11.02 |
申请号 |
WO2000US11736 |
申请日期 |
2000.04.28 |
申请人 |
STRATOTECH CORPORATION;SIEMERS, WARREN, G.;HAMOR, GARY, D. |
发明人 |
SIEMERS, WARREN, G.;HAMOR, GARY, D. |
分类号 |
F24F7/06;B01D46/00;B01D46/02;B08B15/02;F24F3/16;(IPC1-7):B01D46/00 |
主分类号 |
F24F7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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