| 摘要 |
PROBLEM TO BE SOLVED: To restrain the surface of a lower electrode of Ru or Ir from being roughened by oxidation. SOLUTION: A first and a second high-permittivity oxide film, 103 and 104, are successively laminated between an upper electrode layer 105 and a lower electrode layer 102. The first high-permittivity oxide film layer 103 is formed on the lower electrode of Ru or Ir in an atmosphere where an oxidative effect is weakened, and the second high-permittivity oxide film 104 is formed on the first high-permittivity oxide film layer 103 in an atmosphere where an oxidative effect is enhanced. The upper electrode layer 105 is formed on the second high- permittivity oxide film layer 104. |
