| 摘要 |
PROBLEM TO BE SOLVED: To inspect the ruggedness on a surface with high resolution by condensing layer beams on the surface of a magnetic disk with an objective lens and a solid-state liquid immersion lens 5 having a prescribed gap from the surface, leading the light quantity of laser beams that are subjected to internal total reflection at the bottom face of the solid-state liquid immersion lens with a polarizing means to be made incident through the objective lens and detecting it with a detecting means. SOLUTION: A laser condensing device consisting of an objective lens 3 and a solid-state liquid immersion lens 5 having a prescribed distance from the surface of a magnetic disk 2 condenses laser beams from a laser beam source 1 on the surface of the disk 2. A polarizing means 6 leads laser beams that are subjected to internal total reflection on the bottom face of the lens 5 to a detector 8 via the lens 3, and the detector 8 detects light quantity of the laser beams. The ruggedness on the surface of the disk 2 can be measured by measuring the light quantity of the laser beams due to action by evanescent connection at the bottom face of the lens 5. Consequently, it is possible to inspect the ruggedness of the degree of very high flatness. |
